Imaging microwave electric fields using a near-field scanning microwave microscope

By scanning a fine open-ended coaxial probe above an operating microwave device, we image local electric fields generated by the device at microwave frequencies. The probe is sensitive to the electric flux normal to the face of its center conductor, allowing different components of the field to be imaged by orienting the probe appropriately. Using a simple model of the microscope, we are able to interpret the system's output and determine the magnitude of the electric field at the probe tip. We show images of electric field components above a copper microstrip transmission line driven at 8 GHz, with a spatial resolution of approximately 200 mm. (C) 1999 American Institute of Physics. [S0003-6951(99)05201-8].