Characterization and gas-sensing behavior of an iron oxide thin film prepared by atomic layer deposition

被引：72

作者：

Aronniemi, Mikko ^{[1
]}

Saino, J. ^{[1
]}

Lahtinen, J. ^{[1
]}

机构：

[1] Helsinki Univ Technol, Phys Lab, FI-02015 Helsinki, Finland

来源：

THIN SOLID FILMS | 2008年 / 516卷 / 18期

关键词：

iron oxide; thin film; gas sensor; atomic layer deposition; atomic force microscopy;

D O I：

10.1016/j.tsf.2007.11.011

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work we investigate an iron oxide thin film grown with atomic layer deposition for a gas sensor application. The objective is to characterize the structural, chemical, and electrical properties of the film, and to demonstrate its gas-sensitivity. The obtained scanning electron microscopy and atomic force microscopy results indicate that the film has a granular structure and that it has grown mainly on the glass substrate leaving the platinum electrodes uncovered. X-ray diffraction results show that iron oxide is in the alpha-Fe2O3 (hematite) phase. X-ray photoelectron spectra recorded at elevated temperature imply that the surface iron is mainly in the Fe3+ state and that oxygen has two chemical states: one corresponding to the lattice oxygen and the other to adsorbed oxygen species. Electric conductivity has an activation energy of 0.3-0.5 eV and almost Ohmic current-voltage dependency. When exposed to O-2 and CO, a typical n-type response is observed. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：6110 / 6115

页数：6

共 47 条

[31] SOME ELECTRICAL-PROPERTIES OF GAMMA-FE2O3 CERAMICS [J].

NAKATANI, Y ;

MATSUOKA, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1983, 22 (02) :233-239

[32] EFFECTS OF SULFATE ION ON GAS SENSITIVE PROPERTIES OF ALPHA-FE2O3 CERAMICS [J].

NAKATANI, Y ;

MATSUOKA, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (12) :L758-L760

[33] Electrical characterization of Fe2O3 humidity sensors doped with Li+, Zn2+ and Au3+ ions [J].

Neri, G ;

Bonavita, A ;

Galvagno, S ;

Donato, N ;

Caddemi, A .

SENSORS AND ACTUATORS B-CHEMICAL, 2005, 111 :71-77

[34] O2 sensing properties of Zn- and Au-doped Fe2O3 thin films [J].

Neri, G ;

Bonavita, A ;

Galvagno, S ;

Li, YX ;

Galatsis, K ;

Wlodarski, W .

IEEE SENSORS JOURNAL, 2003, 3 (02) :195-198

[35] SELECTIVE PETROL VAPOR SENSOR-BASED ON AN FE2O3 THIN-FILM [J].

POGHOSSIAN, AS ;

ABOVIAN, HV ;

AROUTIOUNIAN, VM .

SENSORS AND ACTUATORS B-CHEMICAL, 1994, 18 (1-3) :155-157

[36] Formation of metal oxide particles in atomic layer deposition during the chemisorption of metal chlorides: A review [J].

Puurunen, RL .

CHEMICAL VAPOR DEPOSITION, 2005, 11 (02) :79-90

[37] Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process [J].

Puurunen, RL .

JOURNAL OF APPLIED PHYSICS, 2005, 97 (12)

[38] Gas sensing properties of epitaxial SnO2 thin films prepared by atomic layer deposition [J].

Rosenthal, A ;

Tarre, A ;

Gerst, A ;

Sundqvist, J ;

Hårsta, A ;

Aidla, A ;

Aarik, J ;

Sammelselg, V ;

Uustare, T .

SENSORS AND ACTUATORS B-CHEMICAL, 2003, 93 (1-3) :552-555

[39] An electrochemical deposition route for obtaining α-Fe2O3 thin films -: II.: EQCM study and semiconductor properties [J].

Schrebler, Ricardo ;

Llewelyn, Cynthia ;

Vera, Francisca ;

Cury, Paula ;

Munoz, Eduardo ;

del Rio, Rodrigo ;

Meier, Humberto Gomez ;

Cordova, Ricardo ;

Dalchiele, Enrique A. .

ELECTROCHEMICAL AND SOLID STATE LETTERS, 2007, 10 (10) :D95-D99

[40] NO2 gas sensitivity of sol-gel-derived alpha-Fe2O3 thin films [J].

Sun, HT ;

Cantalini, C ;

Faccio, M ;

Pelino, M .

THIN SOLID FILMS, 1995, 269 (1-2) :97-101

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