A fluid microconnector seal for packaging applications

被引:3
作者
Friedrich, CR [1 ]
Avula, RRK [1 ]
Gugale, S [1 ]
机构
[1] Michigan Technol Univ, Ctr Wireless Integrated Microsyst, Dept Engn Mech, Houghton, MI 49931 USA
关键词
D O I
10.1088/0960-1317/15/6/001
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An elastic seal was developed for fluid microconnectors. The seal can accommodate a variety of tube configurations including multiple tubes, inline connections and package bulkhead connections. The seal is polydimethylsiloxane (PDMS) cast into mechanically micromachined molds and it seals by an interference fit with an inserted rigid tube. Seals designed for various pressures were fabricated and tested for leakage and internal wear due to repeated insertions of a tube. It was found that properly designed and fabricated seals did not leak after 70 insertion and removal cycles of the tube. The seals experienced a rapid initial wear but the rate of wear greatly reduced after many insertions. If this is accounted for in the design and operation of a connector, the seals provide a reliable solution for microsystem packages where fluid connections must be broken and re-established without moving parts, tools or outside energy sources.
引用
收藏
页码:1115 / 1124
页数:10
相关论文
共 15 条
[1]   Re-configurable fluid circuits by PDMS elastomer micromachining [J].
Armani, D ;
Liu, C ;
Aluru, N .
MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1999, :222-227
[2]   A hydrogel-actuated smart microvalve with a porous diffusion barrier back-plate for active flow control [J].
Baldi, A ;
Gu, YD ;
Loftness, PE ;
Siegel, RA ;
Ziaie, B .
FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2002, :105-108
[3]  
JAEGGI D, 1998, P SOL STAT SENS ACT, P112
[4]  
KAMPER KP, 1998, P MEMS 98 HEID GERM, P322
[5]   Single-molecule DNA amplification and analysis in an integrated microfluidic device [J].
Lagally, ET ;
Medintz, I ;
Mathies, RA .
ANALYTICAL CHEMISTRY, 2001, 73 (03) :565-570
[6]   Microfluidic plastic interconnects for multi-bioanalysis chip modules [J].
Man, PF ;
Jones, DK ;
Mastrangelo, CH .
MICROMACHINED DEVICES AND COMPONENTS III, 1997, 3224 :196-200
[7]   Fabrication of plastic microfluidic components [J].
Martin, PM ;
Matson, DW ;
Bennett, WD ;
Hammerstrom, DJ .
MICROFLUIDIC DEVICES AND SYSTEMS, 1998, 3515 :172-176
[8]  
Mourlas N. J., 1999, P TRANSD 99 SEND JAP, P1888
[9]   Self-aligning microfluidic interconnects for glass- and plastic-based microfluidic systems [J].
Puntambekar, A ;
Ahn, CH .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2002, 12 (01) :35-40
[10]   High-throughput genetic analysis using microfabricated 96-sample capillary array electrophoresis microplates [J].
Simpson, PC ;
Roach, D ;
Woolley, AT ;
Thorsen, T ;
Johnston, R ;
Sensabaugh, GF ;
Mathies, RA .
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 1998, 95 (05) :2256-2261