Effective dielectric function of mixtures of three or more materials:: a numerical procedure for computations

被引:70
作者
Bosch, S
Ferré-Borrull, J
Leinfellner, N
Canillas, A
机构
[1] Univ Barcelona, Dept Fis Aplicada & Opt, E-08028 Barcelona, Spain
[2] Fraunhofer Inst Appl Opt & Precis Engn, D-07745 Jena, Germany
关键词
dielectric phenomena; ellipsometry; reflection spectroscopy; surface structure; morphology; roughness; and topography;
D O I
10.1016/S0039-6028(00)00354-X
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A numerical procedure for solving the mathematical equations that define the effective medium for a mixture of materials is presented. The basic idea is to transform the inherent complex root-finding problem into a minimization task in real space so that the method can be implemented through a standard two-dimensional minimization algorithm. This leads to general, simple and useful procedures for ellipsometric and/or spectrophotometric data analysis in the optical characterization of materials and surfaces. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:9 / 17
页数:9
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