INSITU OPTICAL CHARACTERIZATIONS FOR RF PLASMA DEPOSITED A-SI - H THIN-FILMS

被引：27

作者：

CANILLAS, A

BERTRAN, E

ANDUJAR, JL

MORENZA, JL

机构：

来源：

VACUUM | 1989年 / 39卷 / 7-8期

关键词：

D O I：

10.1016/0042-207X(89)90037-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：785 / 787

页数：3

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