A SPECTROSCOPIC ELLIPSOMETRY STUDY OF THE NUCLEATION AND GROWTH OF PLASMA-DEPOSITED AMORPHOUS-SILICON

被引：42

作者：

DREVILLON, B

机构：

来源：

THIN SOLID FILMS | 1985年 / 130卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(85)90305-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：165 / 170

页数：6

共 16 条

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