IMPROVEMENTS OF PHASE-MODULATED ELLIPSOMETRY

被引：113

作者：

ACHER, O ^{[1
]}

BIGAN, E ^{[1
]}

DREVILLON, B ^{[1
]}

机构：

[1] ECOLE POLYTECH,PHYS INTERFACES & COUCHES MINCES,CNRS,ER 258,F-91128 PALAISEAU,FRANCE

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1989年 / 60卷 / 01期

关键词：

D O I：

10.1063/1.1140580

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：65 / 77

页数：13

共 19 条

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[2]

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[5]

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DREVILLON, B ;

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[7] WAVELENGTH-SCANNING POLARIZATION-MODULATION ELLIPSOMETRY - SOME PRACTICAL CONSIDERATIONS [J].

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RITZ, VH .

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[8]

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CANIT, JC ;

BADOZ, J .

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[10]

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