REAL-TIME AND SPECTROSCOPIC ELLIPSOMETRY OF FILM GROWTH - APPLICATION TO MULTILAYER SYSTEMS IN PLASMA AND CVD PROCESSING OF SEMICONDUCTORS

被引：34

作者：

THEETEN, JB ^{[1
]}

机构：

[1] LAB PHYS APPL 3,F-94450 LIMEIL,FRANCE

来源：

SURFACE SCIENCE | 1980年 / 96卷 / 1-3期

关键词：

D O I：

10.1016/0039-6028(80)90307-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：275 / 293

页数：19

共 25 条

[1] HIGH PRECISION SCANNING ELLIPSOMETER [J].

ASPNES, DE ;

STUDNA, AA .

APPLIED OPTICS, 1975, 14 (01) :220-228

[2] INVESTIGATION OF EFFECTIVE-MEDIUM MODELS OF MICROSCOPIC SURFACE-ROUGHNESS BY SPECTROSCOPIC ELLIPSOMETRY [J].

ASPNES, DE ;

THEETEN, JB .

PHYSICAL REVIEW B, 1979, 20 (08) :3292-3302

[3] OPTICAL-PROPERTIES OF THE INTERFACE BETWEEN SI AND ITS THERMALLY GROWN OXIDE [J].

ASPNES, DE ;

THEETEN, JB .

PHYSICAL REVIEW LETTERS, 1979, 43 (14) :1046-1050

[4] METHODS FOR DRIFT STABILIZATION AND PHOTOMULTIPLIER LINEARIZATION FOR PHOTOMETRIC ELLIPSOMETERS AND POLARIMETERS [J].

ASPNES, DE ;

STUDNA, AA .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (03) :291-297

[5]

Aspnes DE, 1976, OPTICAL PROPERTIES S

[6]

AZZAM RMA, 1977, ELLIPSOMETRY POLARIZ, P319

[7] Calculation of various physics constants in heterogenous substances I Dielectricity constants and conductivity of mixed bodies from isotropic substances [J].

Bruggeman, DAG .

ANNALEN DER PHYSIK, 1935, 24 (07) :636-664

[8] SOME PROPERTIES OF PLASMA-GROWN GAAS OXIDES [J].

CHANG, RPH .

THIN SOLID FILMS, 1979, 56 (1-2) :89-106

[9] APPLICATION OF SELECTIVE CHEMICAL-REACTION CONCEPT FOR CONTROLLING THE PROPERTIES OF OXIDES ON GAAS [J].

CHANG, RPH ;

COLEMAN, JJ ;

POLAK, AJ ;

FELDMAN, LC ;

CHANG, CC .

APPLIED PHYSICS LETTERS, 1979, 34 (03) :237-238

[10] ERRORS ARISING FROM SURFACE ROUGHNESS IN ELLIPSOMETRIC MEASUREMENT OF REFRACTIVE INDEX OF A SURFACE [J].

FENSTERMAKER, CA ;

MCCRACKIN, FL .

SURFACE SCIENCE, 1969, 16 :85-+

← 1 2 3 →