Study on the Combined Effects of Solvent Evaporation and Polymer Flow upon Block Copolymer Self-Assembly and Alignment on Topographic Patterns

被引:25
作者
Fitzgerald, Thomas G. [1 ,2 ]
Farrell, Richard A. [1 ,2 ,3 ]
Petkov, Nikolay [3 ,4 ]
Bolger, Ciara T. [1 ,2 ]
Shaw, Matthew T. [1 ,2 ,5 ]
Charpin, Jean P. F. [6 ]
Gleeson, James P. [6 ]
Holmes, Justin D. [1 ,2 ,3 ]
Morris, Michael A. [1 ,2 ,3 ]
机构
[1] Natl Univ Ireland Univ Coll Cork, Dept Chem, Mat Chem Sect, Cork, Ireland
[2] Trinity Coll Dublin, CRANN, Dublin, Ireland
[3] Tyndall Natl Inst, Micronano Ctr, Cork, Ireland
[4] Tyndall Natl Inst, EMAF, Cork, Ireland
[5] Intel Ireland Ltd, Leixlip, Co Kildare, Ireland
[6] Univ Limerick, Dept Math & Stat, MACSI, Limerick, Ireland
关键词
X-RAY-LITHOGRAPHY; THIN-FILMS; GRAPHOEPITAXY; NANOSTRUCTURES; METHACRYLATE); CYLINDERS; EVOLUTION; DYNAMICS; BEHAVIOR; ARRAYS;
D O I
10.1021/la9018162
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Microphase separation of a polystyrene-block-polyisoprene-block-polystyrene triblock copolymer thin Film under confined conditions (i.e., graphoepitaxy) results in ordered periodic arrays of polystyrene cylinders aligned parallel to the channel side-wall and base in a polyisoprene matrix. Polymer orientation and translational ordering with respect to the topographic substrate were elucidated by atomic force microscopy (AFM) while film thickness and polymer profile within the channel were monitored by cross-sectional transmission electron microscopy (TEM) as a function of time over a 6 h annealing period at 120 degrees C. Upon thermal annealing, the polymer film simultaneously undergoes three processes: microphase separation, evaporation of trapped solvent, and mass transport of polymer from the mesas into the channels. A significant volume of solvent is trapped within the polymer film upon spin coating arising from the increased polymer/substrate interfacial area due to the topographic pattern. Mass transport of polymer during this process results in nonuniform films, where subtle changes in the film thickness within the channel have profound effects on the microphase separation process. The initially disordered structure within the film underwent an orientation transition via an intermediate formation of perpendicular cylinders (nonequilibrium) to a parallel (equilibrium) orientation with respect to the channel base. Herein, we present a time-resolved study of the cylinder reorientation process detailing how changing film thickness during the annealing process dramatically affects both the local and lateral orientation of the observed structure. Finally, a brief mathematical model is provided to evaluate spin coating over a complex topography following a classical asymptotic approximation of the Navier-Stokes equations for the as-deposited films.
引用
收藏
页码:13551 / 13560
页数:10
相关论文
共 66 条
[1]   Graphoepitaxy of self-assembled block copolymers on two-dimensional periodic patterned templates [J].
Bita, Ion ;
Yang, Joel K. W. ;
Jung, Yeon Sik ;
Ross, Caroline A. ;
Thomas, Edwin L. ;
Berggren, Karl K. .
SCIENCE, 2008, 321 (5891) :939-943
[2]   Self-aligned self assembly of multi-nanowire silicon field effect transistors [J].
Black, CT .
APPLIED PHYSICS LETTERS, 2005, 87 (16) :1-3
[3]   Nanometer-scale pattern registration and alignment by directed diblock copolymer self-assembly [J].
Black, CT ;
Bezencenet, O .
IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2004, 3 (03) :412-415
[4]   Control of self-assembly of lithographically patternable block copolymer films [J].
Bosworth, Joan K. ;
Paik, Marvin Y. ;
Ruiz, Ricardo ;
Schwartz, Evan L. ;
Huang, Jenny Q. ;
Ko, Albert W. ;
Smilgies, Detlef-M. ;
Black, Charles T. ;
Ober, Christopher K. .
ACS NANO, 2008, 2 (07) :1396-1402
[5]   Sub-50 nm feature sizes using positive tone molecular glass resists for EUV lithography [J].
Chang, SW ;
Ayothi, R ;
Bratton, D ;
Yang, D ;
Felix, N ;
Cao, HB ;
Deng, H ;
Ober, CK .
JOURNAL OF MATERIALS CHEMISTRY, 2006, 16 (15) :1470-1474
[6]   Spin coating of non-Newtonian fluids with a moving front [J].
Charpin, J. P. F. ;
Lombe, M. ;
Myers, T. G. .
PHYSICAL REVIEW E, 2007, 76 (01)
[7]   Rheological behaviour of nanofluids [J].
Chen, Haisheng ;
Ding, Yulong ;
Tan, Chunqing .
NEW JOURNAL OF PHYSICS, 2007, 9
[8]   Dense self-assembly on sparse chemical patterns: Rectifying and multiplying lithographic patterns using block copolymers [J].
Cheng, Joy Y. ;
Rettner, Charles T. ;
Sanders, Daniel P. ;
Kim, Ho-Cheol ;
Hinsberg, William D. .
ADVANCED MATERIALS, 2008, 20 (16) :3155-3158
[9]   Fabrication of nanostructures with long-range order using block copolymer lithography [J].
Cheng, JY ;
Ross, CA ;
Thomas, EL ;
Smith, HI ;
Vancso, GJ .
APPLIED PHYSICS LETTERS, 2002, 81 (19) :3657-3659
[10]   Nanostructure engineering by templated self-assembly of block copolymers [J].
Cheng, JY ;
Mayes, AM ;
Ross, CA .
NATURE MATERIALS, 2004, 3 (11) :823-828