Low pressure magnetron sputtering and selfsputtering discharges

Operation of three magnetrons with diameters 100 - 160 mm have been measured at pressures below 0.1 Pa. At low and medium discharge power density less than or equal to 10W/cm(2), stable discharge has been achieved down to the Ar pressure range (1.1-2) x 10(-2) Pa. Discharge characteristics of selfsputtering discharges have been measured in the range of target power densities 2 W/cm(2) to 100 W/cm(2). Selfsputtering of Cu was achieved at power density 57 W/cm(2). Selfsputtering was observed on other five target materials: Ag, Pb, Cd, brass and on Al bronze.