Si-assisted growth of InAs nanowires

被引:231
作者
Park, Hyun D. [1 ]
Prokes, S. M.
Twigg, M. E.
Cammarata, Robert C.
Gaillot, Anne-Claire
机构
[1] USN, Res Lab, Washington, DC 20375 USA
[2] Johns Hopkins Univ, Baltimore, MD 21218 USA
关键词
D O I
10.1063/1.2398917
中图分类号
O59 [应用物理学];
学科分类号
摘要
The authors report on the growth of InAs nanowires using nanometer-sized Si clusters in a closed system without any metal catalyst. The growth was performed at 580 degrees C for 30 min using 1.3 nm thickness of SiOx. It is suggested that the nanowire growth occurred due to highly reactive nanometer-sized Si clusters, which are formed by phase separation of SiOx. The authors have also examined the vapor-liquid-solid (VLS) mechanism under various oxidizing conditions, including different oxygen pressures (200 and 800 mTorr) and oxidized Au-In tip. The results indicate the inhibiting effect of oxygen on the VLS mechanism. (c) 2006 American Institute of Physics.
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页数:3
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