Metalorganic vapor phase epitaxy of SB-doped ZnSe

被引:15
作者
Takemura, M
Goto, H
Ido, T
机构
[1] Chubu Univ, Aichi, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1997年 / 36卷 / 5A期
关键词
p-ZnSe; Sb-doping; MOVPE;
D O I
10.1143/JJAP.36.L540
中图分类号
O59 [应用物理学];
学科分类号
摘要
The Sb-doped ZnSe was grown on (100)GaAs substrate by using the Metalorganic Vapor Phase Epilaxy method in atmospheric pressure in order to obtain a p-type ZnSe film. The C-V measurement of the Sb-doped ZnSe layer suggests a p-type conduction. The maximum space charge concentration obtained was 1.5 x 10(16) cm(-3). The acceptor level of Sb, which was estimated from the photoluminescence spectrum, was found to be GB meV.
引用
收藏
页码:L540 / L542
页数:3
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