High-speed optical modulation based on carrier depletion in a silicon waveguide

被引:508
作者
Liu, Ansheng
Liao, Ling
Rubin, Doron
Nguyen, Hat
Ciftcioglu, Berkehan
Chetrit, Yoel
Izhaky, Nahum
Paniccia, Mario
机构
[1] Intel Corp, Santa Clara, CA 95054 USA
[2] Intel Corp, IL-91031 Jerusalem, Israel
关键词
D O I
10.1364/OE.15.000660
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We present a high-speed and highly scalable silicon optical modulator based on the free carrier plasma dispersion effect. The fast refractive index modulation of the device is due to electric-field-induced carrier depletion in a Silicon-on-Insulator waveguide containing a reverse biased pn junction. To achieve high-speed performance, a travelling-wave design is used to allow co-propagation of electrical and optical signals along the waveguide. We demonstrate high-frequency modulator optical response with 3 dB bandwidth of similar to 20 GHz and data transmission up to 30 Gb/s. Such high-speed data transmission capability will enable silicon modulators to be one of the key building blocks for integrated silicon photonic chips for next generation communication networks as well as future high performance computing applications. (c) 2007 Optical Society of America.
引用
收藏
页码:660 / 668
页数:9
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