High-speed silicon electrooptic modulator design

被引:48
作者
Gan, FW [1 ]
Kärtner, FX [1 ]
机构
[1] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA
基金
美国国家科学基金会;
关键词
electronic carrier injection; high-index contrast silicon (Si) waveguide; high-speed optical modulator;
D O I
10.1109/LPT.2005.846756
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An electrically driven Mach-Zehnder waveguide modulator based on high-index contrast silicon split-ridge waveguide technology and electronic carrier injection is proposed. The excellent optical and carrier confinement possible in high-index contrast waveguide devices, together with good thermal heat sinking and forward biased operation, enables high-speed modulation with small signal modulation bandwidths beyond 20 GHz, a V, times length figure of merit of V pi L = 0.5 V center dot cm and an insertion loss of about 4 dB. The modulator can be fabricated in a complementary metal-oxide-semiconductor compatible way.
引用
收藏
页码:1007 / 1009
页数:3
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