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RF magnetron sputtering of polymers

被引：31
作者：
Biederman, H
Bilkova, P
Jezek, J
Hlidek, P
Slavinska, D
机构：
[1] Faculty of Mathematics and Physics, Charles University, Prague
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 1997年 / 218卷
关键词：
D O I：
10.1016/S0022-3093(97)00196-8
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
RF sputtering of polymeric materials such as polytetrafluoroethylene (PTFE) and polyethylene (PE) has been studied. Threshold powers of 220 and 80 W for the self-sputtering glow discharge mode were found for PTFE and PE, respectively. FTIR absorption data using polarized light disclosed a structural anisotropy of the sputtered PTFE films. A simple structural model is proposed. The first results obtained by FTIR spectroscopy of sputtered PE films are presented. (C) 1997 Elsevier Science B.V.
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页码：44 / 49
页数：6
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