Clustering of vacancy defects in high-purity semi-insulating SiC

被引:27
作者
Aavikko, R. [1 ]
Saarinen, K.
Tuomisto, F.
Magnusson, B.
Son, N. T.
Janzen, E.
机构
[1] Aalto Univ, Phys Lab, Espoo 02015, Finland
[2] Linkoping Univ, Dept Phys & Measurement Technol, SE-58183 Linkoping, Sweden
关键词
D O I
10.1103/PhysRevB.75.085208
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Positron lifetime spectroscopy was used to study native vacancy defects in semi-insulating silicon carbide. The material is shown to contain (i) vacancy clusters consisting of four to five missing atoms and (ii) Si-vacancy-related negatively charged defects. The total open volume bound to the clusters anticorrelates with the electrical resistivity in both as-grown and annealed materials. Our results suggest that Si-vacancy-related complexes electrically compensate the as-grown material, but migrate to increase the size of the clusters during annealing, leading to loss of resistivity.
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页数:8
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共 47 条
[1]   The influence of substrate temperature on the evolution of ion implantation-induced defects in epitaxial 6H-SiC [J].
Anwand, W ;
Brauer, G ;
Wirth, H ;
Skorupa, W ;
Coleman, PG .
APPLIED SURFACE SCIENCE, 2002, 194 (1-4) :127-130
[2]   Ion implantation induced defects in 6H-SiC and their annealing behaviour [J].
Anwand, W ;
Brauer, G ;
Panknin, D ;
Skorupa, W .
POSITRON ANNIHILATION - ICPA-12, 2001, 363-3 :442-444
[3]   Optical transitions of the silicon vacancy in 6H-SiC studied by positron annihilation spectroscopy -: art. no. 075206 [J].
Arpiainen, S ;
Saarinen, K ;
Hautojärvi, P ;
Henry, L ;
Barthe, MF ;
Corbel, C .
PHYSICAL REVIEW B, 2002, 66 (07) :752061-7520610
[4]   Positron lifetimes and positron moderation of 4H-Sic subjected to various treatments [J].
Bauer-Kugelmann, W ;
Kogel, G ;
Sperr, P ;
Triftshauser, W .
POSITRON ANNIHILATION: ICPA-11 - PROCEEDINGS OF THE 11TH INTERNATIONAL CONFERENCE ON POSITRON ANNIHILATION, KANSAS CITY, MISSOURI, USA, MAY 1997, 1997, 255-2 :662-664
[5]   Ab initio study of the annealing of vacancies and interstitials in cubic SiC:: Vacancy-interstitial recombination and aggregation of carbon interstitials -: art. no. 235202 [J].
Bockstedte, M ;
Mattausch, A ;
Pankratov, O .
PHYSICAL REVIEW B, 2004, 69 (23) :235202-1
[6]   ELECTRON-POSITRON DENSITY-FUNCTIONAL THEORY [J].
BORONSKI, E ;
NIEMINEN, RM .
PHYSICAL REVIEW B, 1986, 34 (06) :3820-3831
[7]   Positron studies of defects in ion-implanted SiC [J].
Brauer, G ;
Anwand, W ;
Coleman, PG ;
Knights, AP ;
Plazaola, F ;
Pacaud, Y ;
Skorupa, W ;
Stormer, J ;
Willutzki, P .
PHYSICAL REVIEW B, 1996, 54 (05) :3084-3092
[8]   Post-implantation annealing of SiC studied by slow-positron spectroscopies [J].
Brauer, G ;
Anwand, W ;
Coleman, PG ;
Stormer, J ;
Plazaola, F ;
Campillo, JM ;
Pacaud, Y ;
Skorupa, W .
JOURNAL OF PHYSICS-CONDENSED MATTER, 1998, 10 (05) :1147-1156
[9]   Evaluation of some basic positron-related characteristics of SiC [J].
Brauer, G ;
Anwand, W ;
Nicht, EM ;
Kuriplach, J ;
Sob, M ;
Wagner, N ;
Coleman, PG ;
Puska, MJ ;
Korhonen, T .
PHYSICAL REVIEW B, 1996, 54 (04) :2512-2517
[10]   Evidence for negatively charged vacancy defects in 6H-SiC after low-energy proton implantation [J].
Britton, DT ;
Barthe, MF ;
Corbel, C ;
Hempel, A ;
Henry, L ;
Desgardin, P ;
Bauer-Kugelmann, W ;
Kögel, G ;
Sperr, P ;
Triftshäuser, W .
APPLIED PHYSICS LETTERS, 2001, 78 (09) :1234-1236