Stability of molded polydimethylsiloxane microstructures

被引：296

作者：

Delamarche, E ^{[1
]}

Schmid, H ^{[1
]}

Michel, B ^{[1
]}

Biebuyck, H ^{[1
]}

机构：

[1] IBM CORP,DIV RES,ZURICH RES LAB,CH-8803 RUSCHLIKON,SWITZERLAND

来源：

ADVANCED MATERIALS | 1997年 / 9卷 / 09期

关键词：

D O I：

10.1002/adma.19970090914

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

[No abstract available]

引用

收藏

页码：741 / 746

页数：6

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KUMAR, A
WHITESIDES, GM
[J]. APPLIED PHYSICS LETTERS, 1993, 63 (14) : 2002 - 2004
[12] SCANNING-TUNNELING-MICROSCOPY BASED LITHOGRAPHY OF OCTADECANETHIOL ON AU AND GAAS
LERCEL, MJ
REDINBO, GF
CRAIGHEAD, HG
SHEEN, CW
ALLARA, DL
[J]. APPLIED PHYSICS LETTERS, 1994, 65 (08) : 974 - 976
[13] MECHANISM OF RESIST PATTERN COLLAPSE DURING DEVELOPMENT PROCESS
TANAKA, T
MORIGAMI, M
ATODA, N
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (12B): : 6059 - 6064
[14] MICROFABRICATION BY MICROCONTACT PRINTING OF SELF-ASSEMBLED MONOLAYERS
WILBUR, JL
KUMAR, A
KIM, E
WHITESIDES, GM
[J]. ADVANCED MATERIALS, 1994, 6 (7-8) : 600 - 604
[15] Complex optical surfaces formed by replica molding against elastomeric masters
Xia, YN
Kim, E
Zhao, XM
Rogers, JA
Prentiss, M
Whitesides, GM
[J]. SCIENCE, 1996, 273 (5273) : 347 - 349