Efficient submicron processing of metals with femtosecond UV pulses

被引：42

作者：

Békési, J ^{[1
]}

Klein-Wiele, JH ^{[1
]}

Simon, P ^{[1
]}

机构：

[1] Laser Lab Gottingen EV, D-37077 Gottingen, Germany

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2003年 / 76卷 / 03期

关键词：

D O I：

10.1007/s00339-002-1820-y

中图分类号：

T [工业技术];

学科分类号：

08 [工学];

摘要：

The generation of submicron-sized holes on metal surfaces by applying femtosecond UV laser pulses was investigated. Different optical schemes based on a Schwarzschild-type reflective objective were used to reach optimized ablation quality and efficiency in different applications (hole ablation, through-hole drilling, generation of surface patterns consisting of holes, etc.). Submicron-sized holes and hole patterns were ablated onto metal surfaces and drilled through similar to5-mum-thick steel foils with 600-nm diameter on the output side. Using a special optical interferometric method, large-area surface processing of high-conductivity materials in the submicron regime was performed. Combining these techniques with the application of high-repetition-rate ultra-short UV laser sources, large-area sub-mum processing of all kinds of materials in industrial environments is possible.

引用

页码：355 / 357

页数：3

共 20 条

[1]

BEKESI J, IN PRESS APPL PHYS B

[2]

SUBMICRON PERIODIC STRUCTURES PRODUCED ON POLYMER SURFACES WITH POLARIZED EXCIMER LASER ULTRAVIOLET-RADIATION [J].