High resolution, direct detection x-ray imagers

被引:47
作者
Street, RA [1 ]
Ready, SE [1 ]
Rahn, JT [1 ]
Mulato, M [1 ]
Shah, K [1 ]
Bennett, PR [1 ]
Mei, P [1 ]
Lu, JP [1 ]
Apte, RB [1 ]
Ho, J [1 ]
van Schuylenbergh, K [1 ]
Lemmi, F [1 ]
Boyce, JB [1 ]
Nylen, P [1 ]
Schieber, M [1 ]
Hermon, H [1 ]
机构
[1] Xerox Corp, Palo Alto Res Ctr, Palo Alto, CA 94304 USA
来源
MEDICAL IMAGING 2000: PHYSICS OF MEDICAL IMAGING | 2000年 / 3977卷
关键词
PbI2; HgI2; photoconductor; amorphous silicon; pixel array; radiographic medical imaging;
D O I
10.1117/12.384516
中图分类号
R318 [生物医学工程];
学科分类号
0831 ;
摘要
We report on a-Si direct detection x-ray image sensors with polycrystalline PbI2, and more recently with HgI2. The arrays have 100 micron pixel size and, we study those aspects of the defectors that mainly determine the DQE, such as sensitivity, effective fill factor, dade current noise, noise power spectrum, and x-ray absorption. Line spread function data show that in the PbI2 arrays, most of the signal in the gap between pixels is collected, which is important for high DQE. The leakage current noise agrees with the expected shot noise value with only a small enhancement at high bias voltages. The noise power spectrum under x-ray exposure is reported and compared to the spatial resolution information. The MTF is close to the ideal sine function, but is reduced by the contribution of K-fluorescence in the PbI2 film for which we provide new experimental evidence. The role of noise power aliasing in the DQE and the effect of slight image spreading are discussed. Initial studies of HgI2 as the photoconductor material show very promising results with high x-ray sensitivity and low leakage current.
引用
收藏
页码:418 / 428
页数:11
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