Study of properties of irradiated PMMA by the method of thin sections

被引：12

作者：

El-Kholi, A

Mohr, J

Nazmov, V ^{[1
]}

机构：

[1] RAS, SB, Budker Inst Nucl Phys, Novosibirsk 630090, Russia

[2] Forschungszentrum Karlsruhe, D-76021 Karlsruhe, Germany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2000年 / 448卷 / 1-2期

关键词：

poly(methyl methacrylate); synchrotron radiat ion; mean molecular weight; melting point;

D O I：

10.1016/S0168-9002(00)00239-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In deep-etch X-ray lithography while specific absorption dose changes with depth of PMMA layer. Properties of PMMA material change more quickly with depth. Mean molecular weight, mean molecular number and glass transition temperature versus absorption dose up to 20 kJ/cm(3) were investigated. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：497 / 500

页数：4

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