Structure of the B/Si(100) surface at low boron coverage studied by scanning tunnelling microscopy

被引:23
作者
Kulakov, MA [1 ]
Zhang, Z [1 ]
Zotov, AV [1 ]
Bullemer, B [1 ]
Eisele, I [1 ]
机构
[1] RUSSIAN ACAD SCI,INST AUTOMAT & CONTROL PROC,VLADIVOSTOK 690041,RUSSIA
关键词
D O I
10.1016/S0169-4332(96)00542-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Scanning tunnelling microscopy is used to study the structure of the B/Si(100) surface at low boron coverage, the surface being prepared by high-temperature annealing of heavily B-doped Si(100) samples. The surface reproducibly shows features which are identified as being induced by boron atoms. Based on high-resolution scanning tunnelling microscopy measurements performed at different tip-sample biases, a structural model of the boron-induced features is proposed. The effect of the formation conditions on the atomic structure of the B/Si(100) surface is discussed.
引用
收藏
页码:443 / 449
页数:7
相关论文
共 13 条
[1]   ATOMIC AND ELECTRONIC-STRUCTURE OF B/SI(100) [J].
CAO, R ;
YANG, X ;
PIANETTA, P .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (04) :1455-1458
[2]   PRESERVATION OF A 7 X 7 PERIODICITY AT A BURIED AMORPHOUS-SI/SI(111) INTERFACE [J].
GIBSON, JM ;
GOSSMANN, HJ ;
BEAN, JC ;
TUNG, RT ;
FELDMAN, LC .
PHYSICAL REVIEW LETTERS, 1986, 56 (04) :355-358
[3]   SI(100)-(2X1)BORON RECONSTRUCTION - SELF-LIMITING MONOLAYER DOPING [J].
HEADRICK, RL ;
WEIR, BE ;
LEVI, AFJ ;
EAGLESHAM, DJ ;
FELDMAN, LC .
APPLIED PHYSICS LETTERS, 1990, 57 (26) :2779-2781
[4]   AN ULTRA-HIGH-RESOLUTION CONTROL UNIT FOR A SCANNING TUNNELING MICROSCOPE [J].
HEUELL, P ;
CUZDI, S ;
KULAKOV, MA ;
BULLEMER, B .
THIN SOLID FILMS, 1995, 264 (02) :217-222
[5]   FORMATION OF SI(111)SQUARE-ROOT-3 X SQUARE-ROOT-3-B AND SI EPITAXY ON SI(111)SQUARE-ROOT-3 X SQUARE-ROOT-3-B - LEED AES STUDY [J].
KOROBTSOV, VV ;
LIFSHITS, VG ;
ZOTOV, AV .
SURFACE SCIENCE, 1988, 195 (03) :466-474
[6]  
SARDELA MR, 1991, MATER RES SOC SYMP P, V220, P109, DOI 10.1557/PROC-220-109
[7]   ATOMIC-STRUCTURE AND BONDING OF BORON-INDUCED RECONSTRUCTIONS ON SI(001) [J].
WANG, YJ ;
HAMERS, RJ ;
KAXIRAS, E .
PHYSICAL REVIEW LETTERS, 1995, 74 (03) :403-406
[8]   BORON-INDUCED RECONSTRUCTIONS OF SI(001) INVESTIGATED BY SCANNING-TUNNELING-MICROSCOPY [J].
WANG, YJ ;
HAMERS, RJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (03) :1431-1437
[9]   ELECTRON-MICROSCOPY OF THE ORDERED BORON 2X1 STRUCTURE BURIED IN CRYSTALLINE SILICON [J].
WEIR, BE ;
EAGLESHAM, DJ ;
FELDMAN, LC ;
LUFTMAN, HS ;
HEADRICK, RL .
APPLIED SURFACE SCIENCE, 1995, 84 (04) :413-418
[10]   ELECTRICAL CHARACTERIZATION OF AN ULTRAHIGH CONCENTRATION BORON DELTA-DOPING LAYER [J].
WEIR, BE ;
FELDMAN, LC ;
MONROE, D ;
GROSSMANN, HJ ;
HEADRICK, RL ;
HART, TR .
APPLIED PHYSICS LETTERS, 1994, 65 (06) :737-739