Patterning magnetic films by ion beam irradiation

被引：78

作者：

Terris, BD

Weller, D

Folks, L

Baglin, JEE

Kellock, AJ

Rothuizen, H

Vettiger, P

机构：

[1] IBM Corp, Almaden Res Ctr, San Jose, CA 95120 USA

[2] IBM Corp, Zurich Res Lab, CH-8803 Ruschlikon, Switzerland

来源：

JOURNAL OF APPLIED PHYSICS | 2000年 / 87卷 / 09期

关键词：

D O I：

10.1063/1.372912

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have used ion beam irradiation through a silicon stencil mask to alter the magnetic properties of Co/Pt multilayer and FePt chemically-ordered superlattice films. In both systems, ion irradiation disorders the as-grown films which results in a reduction of the magnetic anisotropy. Regularly spaced micrometer-sized regions of magnetically altered material have been produced over areas of a square millimeter. These magnetic structures have been observed by magnetic force microscopy. By stepping the mask during irradiation, features at twice the spatial frequency of the mask holes have been produced. Such patterned magnetic films are of interest for application in high-density magnetic recording. (C) 2000 American Institute of Physics. [S0021- 8979(00)84908-7].

引用

收藏

页码：7004 / 7006

页数：3

相关论文

共 15 条

[1] A MONTE-CARLO COMPUTER-PROGRAM FOR THE TRANSPORT OF ENERGETIC IONS IN AMORPHOUS TARGETS [J].

BIERSACK, JP ;

HAGGMARK, LG .

NUCLEAR INSTRUMENTS & METHODS, 1980, 174 (1-2) :257-269

[2] ENHANCED MAGNETOOPTICAL KERR-EFFECT IN SPONTANEOUSLY ORDERED FEPT ALLOYS - QUANTITATIVE AGREEMENT BETWEEN THEORY AND EXPERIMENT [J].

CEBOLLADA, A ;

WELLER, D ;

STICHT, J ;

HARP, GR ;

FARROW, RFC ;

MARKS, RF ;

SAVOY, R ;

SCOTT, JC .

PHYSICAL REVIEW B, 1994, 50 (05) :3419-3422

[3] Planar patterned magnetic media obtained by ion irradiation [J].

Chappert, C ;

Bernas, H ;

Ferré, J ;

Kottler, V ;

Jamet, JP ;

Chen, Y ;

Cambril, E ;

Devolder, T ;

Rousseaux, F ;

Mathet, V ;

Launois, H .

SCIENCE, 1998, 280 (5371) :1919-1922

[4] Patterned magnetic nanostructures and quantized magnetic disks [J].

Chou, SY .

PROCEEDINGS OF THE IEEE, 1997, 85 (04) :652-671

[5] Sub-50 nm planar magnetic nanostructures fabricated by ion irradiation [J].

Devolder, T ;

Chappert, C ;

Chen, Y ;

Cambril, E ;

Bernas, H ;

Jamet, JP ;

Ferré, J .

APPLIED PHYSICS LETTERS, 1999, 74 (22) :3383-3385

[6] Fabrication of large area nanostructured magnets by interferometric lithography [J].

Farhoud, M ;

Hwang, M ;

Smith, HI ;

Schattenburg, ML ;

Bae, JM ;

Youcef-Toumi, K ;

Ross, CA .

IEEE TRANSACTIONS ON MAGNETICS, 1998, 34 (04) :1087-1089

[7] Magnetic force microscopy of single-domain cobalt dots patterned using interference lithography [J].

Fernandez, A ;

Bedrossian, PJ ;

Baker, SL ;

Vernon, SP ;

Kania, DR .

IEEE TRANSACTIONS ON MAGNETICS, 1996, 32 (05) :4472-4474

[8] Writing and reading 7.5 Gbits/in(2) longitudinal quantized magnetic disk using magnetic force microscope tips [J].

Kong, LS ;

Zhuang, L ;

Chou, SY .

IEEE TRANSACTIONS ON MAGNETICS, 1997, 33 (05) :3019-3021

[9] Fabrication of planar quantum magnetic disk structure using electron beam lithography, reactive ion etching, and chemical mechanical polishing [J].

Krauss, PR ;

Chou, SY .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (06) :2850-2852

[10] EPITAXIAL PTFE(001) THIN-FILMS ON MGO(001) WITH PERPENDICULAR MAGNETIC-ANISOTROPY [J].

LAIRSON, BM ;

VISOKAY, MR ;

SINCLAIR, R ;

CLEMENS, BM .

APPLIED PHYSICS LETTERS, 1993, 62 (06) :639-641