Nanosoldering Carbon Nanotube Junctions by Local Chemical Vapor Deposition for Improved Device Performance

被引：39

作者：

Do, Jae-Won ^{[1
,6
]}

Estrada, David ^{[1
,5
]}

Xie, Xu ^{[2
,3
]}

Chang, Noel N. ^{[4
]}

Mallek, Justin ^{[4
]}

Girolami, Gregory S. ^{[4
,6
]}

Rogers, John A. ^{[2
,3
,4
,5
,6
]}

Pop, Eric ^{[1
,5
,6
]}

Lyding, Joseph W. ^{[6
]}

机构：

[1] Univ Illinois, Dept Elect & Comp Engn, Urbana, IL 61801 USA

[2] Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA

[3] Univ Illinois, Frederick Seitz Mat Res Lab, Urbana, IL 61801 USA

[4] Univ Illinois, Dept Chem, Urbana, IL 61801 USA

[5] Univ Illinois, Micro & Nanotechnol Lab, Urbana, IL 61801 USA

[6] Univ Illinois, Beckman Inst Adv Sci & Technol, Urbana, IL 61801 USA

来源：

NANO LETTERS | 2013年 / 13卷 / 12期

基金：

美国国家科学基金会;

关键词：

ARRAYS; PALLADIUM; TRANSPORT; CIRCUITS; ENERGY;

D O I：

10.1021/nl4026083

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The performance of carbon nanotube network (CNN) devices is usually limited by the high resistance of individual nanotube junctions (NJs). We present a novel method to reduce this resistance through a nanoscale chemical vapor deposition (CVD) process. By passing current through the devices in the presence of a gaseous CVD precursor, localized nanoscale Joule heating induced at the NJs stimulates the selective and self-limiting deposition of metallic nano-solder. The effectiveness of this nanosoldering process depends on the work function of the deposited metal (here Pd or HfB2), and it can improve the on/off current ratio of a CNN device by nearly an order of magnitude. This nanosoldering technique could also be applied to other device types where nanoscale resistance components limit overall device performance.

引用

页码：5844 / 5850

页数：7

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