Investigation of void nucleation and propagation during electromigration of flip-chip solder joints using x-ray microscopy

被引:20
作者
Chiu, S. H. [1 ]
Chen, Chih [1 ]
机构
[1] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30050, Taiwan
关键词
D O I
10.1063/1.2425040
中图分类号
O59 [应用物理学];
学科分类号
摘要
X-ray microscopy was employed to investigate void nucleation and propagation during electromigration in solder joints. The shape of the voids at various stages can be clearly observed. The voids became irregular when they propagated to deplete the contact opening. Growth velocity at the early stage was found to be 1.3 mu m/h under 6.5x10(3) A/cm(2) at 150 degrees C, and it decreased to 0.3 mu m/h at later stages. Formation of intermetallic compound (IMC) and compositional changes at the interface of solder/IMC on the chip side were attributed to the retarded growth rate at later stages. (c) 2006 American Institute of Physics.
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页数:3
相关论文
共 11 条
[1]   Study of void formation due to electromigration in flip-chip solder joints using Kelvin bump probes [J].
Chang, Y. W. ;
Liang, S. W. ;
Chen, Chih .
APPLIED PHYSICS LETTERS, 2006, 89 (03)
[2]   Mean-time-to-failure study of flip chip solder joints on Cu/Ni(V)/Al thin-film under-bump-metallization [J].
Choi, WJ ;
Yeh, ECC ;
Tu, KN .
JOURNAL OF APPLIED PHYSICS, 2003, 94 (09) :5665-5671
[3]   Effect of three-dimensional current and temperature distributions on void formation and propagation in flip-chip solder joints during electromigration [J].
Liang, S. W. ;
Chang, Y. W. ;
Shao, T. L. ;
Chen, Chih ;
Tu, K. N. .
APPLIED PHYSICS LETTERS, 2006, 89 (02)
[4]   Microstructure-electromigration correlation in a thin stripe of eutectic SnPb solder stressed between Cu electrodes [J].
Liu, CY ;
Chen, C ;
Liao, CN ;
Tu, KN .
APPLIED PHYSICS LETTERS, 1999, 75 (01) :58-60
[5]   Electromigration in Sn-Pb solder strips as a function of alloy composition [J].
Liu, CY ;
Chen, C ;
Tu, KN .
JOURNAL OF APPLIED PHYSICS, 2000, 88 (10) :5703-5709
[6]   Mechanism of electromigration-induced failure in the 97Pb-3Sn and 37Pb-63Sn composite solder joints [J].
Nah, JW ;
Paik, KW ;
Suh, JO ;
Tu, KN .
JOURNAL OF APPLIED PHYSICS, 2003, 94 (12) :7560-7566
[7]   Dynamical x-ray microscopy investigation of electromigration in passivated inlaid Cu interconnect structures [J].
Schneider, G ;
Denbeaux, G ;
Anderson, EH ;
Bates, B ;
Pearson, A ;
Meyer, MA ;
Zschech, E ;
Hambach, D ;
Stach, EA .
APPLIED PHYSICS LETTERS, 2002, 81 (14) :2535-2537
[8]  
*SEM IND ASS, 2003, INT TECHN ROADM SEM, P4
[9]   Recent advances on electromigration in very-large-scale-integration of interconnects [J].
Tu, KN .
JOURNAL OF APPLIED PHYSICS, 2003, 94 (09) :5451-5473
[10]   Effect of current crowding on void propagation at the interface between intermetallic compound and solder in flip chip solder joints [J].
Zhang, LY ;
Ou, SQ ;
Huang, J ;
Tu, KN ;
Gee, S ;
Nguyen, L .
APPLIED PHYSICS LETTERS, 2006, 88 (01)