Surface properties of ultra-thin tetrahedral amorphous carbon films for magnetic storage technology

被引:65
作者
Casiraghi, C
Ferrari, AC
Ohr, R
Chu, D
Robertson, J
机构
[1] Univ Cambridge, Engn Dept, Cambridge CB2 1PZ, England
[2] IBM STD Germany, D-55131 Mainz, Germany
[3] Cambridge Res Lab Epson, Cambridge CB4 0FE, England
关键词
tetrahedral amorphous carbon; surface characterisation; coatings; nucleation;
D O I
10.1016/j.diamond.2003.10.086
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond-like carbon (DLC) films form a critical protective layer on magnetic hard disks and their reading heads. Film thickness below 2 nm and roughness well below 1 nm are needed for storage density of 200 Gbit/inch(2). We use atomic force microscopy to study the roughness evolution vs. thickness of highly sp(3) hydrogen-free tetrahedral amorphous carbon (ta-C). The roughness of films r generally follows fractal scaling laws, increasing with film thickness h as r=ah(beta), where beta is the growth exponent. For a fixed film thickness and scan length 1, the roughness varies as l(alpha), where alpha is the roughness exponent. We find alpha similar to 0.39 and beta similar to 0-0.1. We performed Monte Carlo simulations, modelling the smoothing effects caused by the thermal spike. The simulation results closely match the experimental findings and define a new growth mechanism for ta-C films. The structural evolution of these ultra-thin films is monitored by Raman spectroscopy. A linear relation between G-peak dispersion and Young's modulus is found. The 2-nm-thick ta-C films are pin-hole free, corrosion resistant, have a Young's Modulus of similar to 100 GPa, sp(3) content of similar to50% and roughness of similar to0.12 nm. So, data storage density of 1 Tbit/inch(2) could be achieved. (C) 2003 Elsevier B.V All rights reserved.
引用
收藏
页码:1416 / 1421
页数:6
相关论文
共 43 条
[21]   Ultrathin CNx overcoats for 1 Tb/in.2 hard disk drive systems [J].
Li, DJ ;
Guruz, MU ;
Bhatia, CS ;
Chung, YW .
APPLIED PHYSICS LETTERS, 2002, 81 (06) :1113-1115
[22]   SUBPLANTATION MODEL FOR FILM GROWTH FROM HYPERTHERMAL SPECIES - APPLICATION TO DIAMOND [J].
LIFSHITZ, Y ;
KASI, SR ;
RABALAIS, JW .
PHYSICAL REVIEW LETTERS, 1989, 62 (11) :1290-1293
[23]   SUBSTANTIATION OF SUBPLANTATION MODEL FOR DIAMOND-LIKE FILM GROWTH BY ATOMIC-FORCE MICROSCOPY [J].
LIFSHITZ, Y ;
LEMPERT, GD ;
GROSSMAN, E .
PHYSICAL REVIEW LETTERS, 1994, 72 (17) :2753-2756
[24]   COMPRESSIVE-STRESS-INDUCED FORMATION OF THIN-FILM TETRAHEDRAL AMORPHOUS-CARBON [J].
MCKENZIE, DR ;
MULLER, D ;
PAILTHORPE, BA .
PHYSICAL REVIEW LETTERS, 1991, 67 (06) :773-776
[25]   HYDROGEN-FREE AMORPHOUS-CARBON PREPARATION AND PROPERTIES [J].
MCKENZIE, DR ;
YIN, Y ;
MARKS, NA ;
DAVIS, CA ;
PAILTHORPE, BA ;
AMARATUNGA, GAJ ;
VEERASAMY, VS .
DIAMOND AND RELATED MATERIALS, 1994, 3 (4-6) :353-360
[26]  
OHR R, IN PRESS SURF COAT T
[27]   Preparation of tetrahedral amorphous carbon films by filtered cathodic vacuum arc deposition [J].
Polo, MC ;
Andújar, JL ;
Hart, A ;
Robertson, J ;
Milne, WI .
DIAMOND AND RELATED MATERIALS, 2000, 9 (3-6) :663-667
[28]   Properties of amorphous carbon-silicon alloys deposited by a high plasma density source [J].
Racine, B ;
Ferrari, AC ;
Morrison, NA ;
Hutchings, I ;
Milne, WI ;
Robertson, J .
JOURNAL OF APPLIED PHYSICS, 2001, 90 (10) :5002-5012
[29]   Surface smoothing by energetic cluster impact [J].
Rattunde, O ;
Moseler, M ;
Häfele, A ;
Kraft, J ;
Rieser, D ;
Haberland, H .
JOURNAL OF APPLIED PHYSICS, 2001, 90 (07) :3226-3231
[30]   Nanotribology of carbon based thin films: the influence of film structure and surface morphology [J].
Riedo, E ;
Chevrier, J ;
Comin, F ;
Brune, H .
SURFACE SCIENCE, 2001, 477 (01) :25-34