Nanoscale field emission structures for ultra-low voltage operation at atmospheric pressure

被引:51
作者
DriskillSmith, AAG
Hasko, DG
Ahmed, H
机构
[1] Microelectronics Research Centre, Cavendish Laboratory, University of Cambridge
关键词
D O I
10.1063/1.120276
中图分类号
O59 [应用物理学];
学科分类号
摘要
Novel field emission devices with electron path lengths an order of magnitude less than the elastic mean free path of electrons in air have been fabricated and tested at atmospheric pressure. The nanoscale-tip field emission system consisted of multiple emitter tips of radii about 1 nm within an extractor aperture of diameter 50 nm. The extractor turn-on voltage was approximately 7.5 V; field-emitted currents of up to 10 nA were collected at extractor voltages of less than 10 V. Maximum current densities of over 10(11) A m(-2) have been observed, and the emission stability in air at atmospheric pressure is better than 3%. (C) 1997 American Institute of Physics.
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页码:3159 / 3161
页数:3
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