InAs-based bipolar transistors grown by molecular beam epitaxy

被引:9
作者
Averett, KL [1 ]
Maimon, S
Wu, X
Koch, MW
Wicks, GW
机构
[1] Univ Rochester, Dept Phys & Astron, Rochester, NY 14627 USA
[2] USAF, Res Lab, MLPS, Wright Patterson AFB, OH 45433 USA
[3] Univ Rochester, Inst Opt, Rochester, NY 14627 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2002年 / 20卷 / 03期
关键词
D O I
10.1116/1.1459461
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Large mobilities and electron saturation velocity make InAs a promising material for high speed devices. Investigations into materials characteristics of doped InAs show nonideal behavior with standard molecular beam epitaxy dopants, silicon, and beryllium. Critical thicknesses for cracking of AlxIn1-xAs on InAs were empirically determined as a function of x. Mesa pn junctions in InAs show no effects of surface Fermi level pinning and exhibit good rectification with low reverse leakage. Bipolar junction transistor and heterojunction bipolar transistor devices are presented, along with their dc electrical characteristics. Common emitter current gains of 100 have been achieved in these bipolar devices. (C) 2002 American Vacuum Society.
引用
收藏
页码:1213 / 1216
页数:4
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