Properties of InGaN quantum-well heterostructures grown on sapphire by metalorganic chemical vapor deposition

被引:34
作者
Grudowski, PA [1 ]
Eiting, CJ [1 ]
Park, J [1 ]
Shelton, BS [1 ]
Lambert, DJH [1 ]
Dupuis, RD [1 ]
机构
[1] UNIV TEXAS,MICROELECT RES CTR,AUSTIN,TX 78712
关键词
D O I
10.1063/1.119959
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the growth and characterization of InGaN heteroepitaxial thin films and quantum-well heterostructures on (0001) sapphire substrates. The III-N heteroepitaxial layers are grown by metalorganic chemical vapor deposition on sapphire substrates using various growth conditions. A comparison of the 300 K photoluminescence (PL) spectra of the samples indicates that a higher PL intensity is measured for the quantum-well structures having an intentional n-type Si-doping concentration. Furthermore, three-, five-, and eight-period InGaN quantum-well structures exhibit similar narrow PL spectra. (C) 1997 American Institute of Physics.
引用
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页码:1537 / 1539
页数:3
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