SI-DOPED INGAN FILMS GROWN ON GAN FILMS

被引:61
作者
NAKAMURA, S
MUKAI, T
SENOH, M
机构
[1] Department of Research and Development, Nichia Chemical Industries Ltd., Tokushima, 774, 491 Oka, Kaminaka, Anan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1993年 / 32卷 / 1A-B期
关键词
SI-DOPED INGAN; GAN; X-RAY ROCKING CURVE; BLUE BAND-EDGE EMISSION; PHOTOLUMINESCENCE; MG-DOPED GAN;
D O I
10.1143/JJAP.32.L16
中图分类号
O59 [应用物理学];
学科分类号
摘要
High-quality Si-doped InGaN films were grown on GaN films for the first time. Strong and sharp band-edge BE emissions were observed at peak wavelengths between 400 nm and 425 nm, while deep-level emissions were not observed in photoluminescence (PL) measurements at room temperature. The intensity of BE emissions of Si-doped InGaN films was about 36 times stronger than that of undoped InGaN films and 20 times stronger than that of the blue emission (at 450 nm) of Mg-doped p-type GaN films. The smallest full width at half-maximum (FWHM) of the double-crystal X-ray rocking curve (XRC) from the Si-doped InGaN films was 6.4 minutes. This value of FWHM was the smallest ever reported for InGaN films.
引用
收藏
页码:L16 / L19
页数:4
相关论文
共 14 条
[1]   EFFECTS OF AIN BUFFER LAYER ON CRYSTALLOGRAPHIC STRUCTURE AND ON ELECTRICAL AND OPTICAL-PROPERTIES OF GAN AND GA1-XALXN(0-LESS-THAN-X-LESS-THAN-OR-EQUAL-TO-0.4) FILMS GROWN ON SAPPHIRE SUBSTRATE BY MOVPE [J].
AKASAKI, I ;
AMANO, H ;
KOIDE, Y ;
HIRAMATSU, K ;
SAWAKI, N .
JOURNAL OF CRYSTAL GROWTH, 1989, 98 (1-2) :209-219
[2]   P-TYPE CONDUCTION IN MG-DOPED GAN TREATED WITH LOW-ENERGY ELECTRON-BEAM IRRADIATION (LEEBI) [J].
AMANO, H ;
KITO, M ;
HIRAMATSU, K ;
AKASAKI, I .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (12) :L2112-L2114
[3]   METALORGANIC VAPOR-PHASE EPITAXIAL-GROWTH OF A HIGH-QUALITY GAN FILM USING AN AIN BUFFER LAYER [J].
AMANO, H ;
SAWAKI, N ;
AKASAKI, I ;
TOYODA, Y .
APPLIED PHYSICS LETTERS, 1986, 48 (05) :353-355
[4]  
Amano H., 1989, I PHYS C SER, V106, P725
[5]   WIDE-GAP SEMICONDUCTOR INGAN AND INGAALN GROWN BY MOVPE [J].
MATSUOKA, T ;
YOSHIMOTO, N ;
SASAKI, T ;
KATSUI, A .
JOURNAL OF ELECTRONIC MATERIALS, 1992, 21 (02) :157-163
[6]  
MATSUOKA T, 1990, INST PHYS CONF SER, P141
[7]   GROWTH OF SI-DOPED ALXGA1-XN ON (0001) SAPPHIRE SUBSTRATE BY METALORGANIC VAPOR-PHASE EPITAXY [J].
MURAKAMI, H ;
ASAHI, T ;
AMANO, H ;
HIRAMATSU, K ;
SAWAKI, N ;
AKASAKI, I .
JOURNAL OF CRYSTAL GROWTH, 1991, 115 (1-4) :648-651
[8]   PROPERTIES OF GA1-XINXN FILMS PREPARED BY MOVPE [J].
NAGATOMO, T ;
KUBOYAMA, T ;
MINAMINO, H ;
OMOTO, O .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (08) :L1334-L1336
[9]   NOVEL METALORGANIC CHEMICAL VAPOR-DEPOSITION SYSTEM FOR GAN GROWTH [J].
NAKAMURA, S ;
HARADA, Y ;
SENO, M .
APPLIED PHYSICS LETTERS, 1991, 58 (18) :2021-2023
[10]   HIGHLY P-TYPED MG-DOPED GAN FILMS GROWN WITH GAN BUFFER LAYERS [J].
NAKAMURA, S ;
SENOH, M ;
MUKAI, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1991, 30 (10A) :L1708-L1711