InGaN-based multi-quantum-well-structure laser diodes

被引:1843
作者
Nakamura, S
Senoh, M
Nagahama, S
Iwasa, N
Yamada, T
Matsushita, T
Kiyoku, H
Sugimoto, Y
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1996年 / 35卷 / 1B期
关键词
InGaN; laser diode; multi-quantum-well structure; Ill-V nitride; etching;
D O I
10.1143/JJAP.35.L74
中图分类号
O59 [应用物理学];
学科分类号
摘要
InGaN multi-quantum-well (MQW) structure laser diodes (LDs) fabricated from III-V nitride materials were grown by metalorganic chemical vapor deposition on sapphire substrates. The mirror facet for a laser cavity was formed by etching of III-V nitride films without cleaving. As an active layer, the InGaN MQW structure was used. The InGaN MQW LDs produced 215 mW at a forward current of 2.3 A, with a sharp peak of light output at 417 nm that had a full width at half-maximum of 1.6 nm under the pulsed current injection at room temperature. The laser threshold current density was 4 kA/cm(2). The emission wavelength is the shortest one ever generated by a semiconductor laser diode.
引用
收藏
页码:L74 / L76
页数:3
相关论文
共 17 条
  • [1] ROOM-TEMPERATURE VIOLET STIMULATED-EMISSION FROM OPTICALLY PUMPED ALGAN/GAINN DOUBLE-HETEROSTRUCTURE
    AMANO, H
    TANAKA, T
    KUNII, Y
    KATO, K
    KIM, ST
    AKASAKI, I
    [J]. APPLIED PHYSICS LETTERS, 1994, 64 (11) : 1377 - 1379
  • [2] P-TYPE CONDUCTION IN MG-DOPED GAN TREATED WITH LOW-ENERGY ELECTRON-BEAM IRRADIATION (LEEBI)
    AMANO, H
    KITO, M
    HIRAMATSU, K
    AKASAKI, I
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (12): : L2112 - L2114
  • [3] STIMULATED EMISSION AND LASER ACTION IN GALLIUM NITRIDE
    DINGLE, R
    SHAKLEE, KL
    LEHENY, RF
    ZETTERSTROM, RB
    [J]. APPLIED PHYSICS LETTERS, 1971, 19 (01) : 5 - +
  • [4] BLUE-GREEN LASER-DIODES
    HAASE, MA
    QIU, J
    DEPUYDT, JM
    CHENG, H
    [J]. APPLIED PHYSICS LETTERS, 1991, 59 (11) : 1272 - 1274
  • [5] ZNCDSE/ZNSSE/ZNMGSSE SCH LASER-DIODE WITH A GAAS BUFFER LAYER
    ITOH, S
    NAKAYAMA, N
    MATSUMOTO, S
    NAGAI, M
    NAKANO, K
    OZAWA, M
    OKUYAMA, H
    TOMIYA, S
    OHATA, T
    IKEDA, M
    ISHIBASHI, A
    MORI, Y
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1994, 33 (7A): : L938 - L940
  • [6] SCHOTTKY-BARRIER PHOTODETECTOR BASED ON MG-DOPED P-TYPE GAN FILMS
    KHAN, MA
    KUZNIA, JN
    OLSON, DT
    BLASINGAME, M
    BHATTARAI, AR
    [J]. APPLIED PHYSICS LETTERS, 1993, 63 (18) : 2455 - 2456
  • [7] VERTICAL-CAVITY STIMULATED-EMISSION FROM PHOTOPUMPED INGAN/GAN HETEROJUNCTIONS AT ROOM-TEMPERATURE
    KHAN, MA
    KRISHNANKUTTY, S
    SKOGMAN, RA
    KUZNIA, JN
    OLSON, DT
    GEORGE, T
    [J]. APPLIED PHYSICS LETTERS, 1994, 65 (05) : 520 - 521
  • [8] LARGE-BAND-GAP SIC, III-V NITRIDE, AND II-VI ZNSE-BASED SEMICONDUCTOR-DEVICE TECHNOLOGIES
    MORKOC, H
    STRITE, S
    GAO, GB
    LIN, ME
    SVERDLOV, B
    BURNS, M
    [J]. JOURNAL OF APPLIED PHYSICS, 1994, 76 (03) : 1363 - 1398
  • [9] INXGA(1-X)N/INYGA(1-Y)N SUPERLATTICES GROWN ON GAN FILMS
    NAKAMURA, S
    MUKAI, T
    SENOH, M
    NAGAHAMA, S
    IWASA, N
    [J]. JOURNAL OF APPLIED PHYSICS, 1993, 74 (06) : 3911 - 3915
  • [10] HIGH-BRIGHTNESS INGAN BLUE, GREEN AND YELLOW LIGHT-EMITTING-DIODES WITH QUANTUM-WELL STRUCTURES
    NAKAMURA, S
    SENOH, N
    IWASA, N
    NAGAHAMA, SI
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1995, 34 (7A): : L797 - L799