InGaN-based multi-quantum-well-structure laser diodes

被引:1843
作者
Nakamura, S
Senoh, M
Nagahama, S
Iwasa, N
Yamada, T
Matsushita, T
Kiyoku, H
Sugimoto, Y
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1996年 / 35卷 / 1B期
关键词
InGaN; laser diode; multi-quantum-well structure; Ill-V nitride; etching;
D O I
10.1143/JJAP.35.L74
中图分类号
O59 [应用物理学];
学科分类号
摘要
InGaN multi-quantum-well (MQW) structure laser diodes (LDs) fabricated from III-V nitride materials were grown by metalorganic chemical vapor deposition on sapphire substrates. The mirror facet for a laser cavity was formed by etching of III-V nitride films without cleaving. As an active layer, the InGaN MQW structure was used. The InGaN MQW LDs produced 215 mW at a forward current of 2.3 A, with a sharp peak of light output at 417 nm that had a full width at half-maximum of 1.6 nm under the pulsed current injection at room temperature. The laser threshold current density was 4 kA/cm(2). The emission wavelength is the shortest one ever generated by a semiconductor laser diode.
引用
收藏
页码:L74 / L76
页数:3
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