Replica molding using polymeric materials: A practical step toward nanomanufacturing

[1] *BAL TEC PROD INC, 1992, EL MICR PREPR TECHN

[2] Imprint lithography with 25-nanometer resolution [J]. SCIENCE, 1996, 272 (5258) : 85 - 87

[3] IMPRINT OF SUB-25 NM VIAS AND TRENCHES IN POLYMERS [J]. APPLIED PHYSICS LETTERS, 1995, 67 (21) : 3114 - 3116

[4] DEVICE FABRICATION BY SCANNED PROBE OXIDATION [J]. SCIENCE, 1995, 270 (5242) : 1625 - 1626

[5] DUNN PN, 1994, SOLID STATE TECH JUN, P49

[6] Early K., 1990, Microelectronic Engineering, V11, P317, DOI 10.1016/0167-9317(90)90122-A

[7] FUJITA J, 1995, APPL PHYS LETT, V66, P3065, DOI 10.1063/1.114279

[8] HURTLEY MC, 1982, DIFFRACTION GRATINGS

[9] MICROTOOL FABRICATION BY ETCH PIT REPLICATION [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (12) : 1741 - 1742

[10] FORMATION OF NANOMETER-SCALE GROOVES IN SILICON WITH A SCANNING TUNNELING MICROSCOPE [J]. SCIENCE, 1993, 259 (5102) : 1724 - 1726

[1] *BAL TEC PROD INC, 1992, EL MICR PREPR TECHN

[2] Imprint lithography with 25-nanometer resolution [J]. SCIENCE, 1996, 272 (5258) : 85 - 87

[3] IMPRINT OF SUB-25 NM VIAS AND TRENCHES IN POLYMERS [J]. APPLIED PHYSICS LETTERS, 1995, 67 (21) : 3114 - 3116

[4] DEVICE FABRICATION BY SCANNED PROBE OXIDATION [J]. SCIENCE, 1995, 270 (5242) : 1625 - 1626

[5] DUNN PN, 1994, SOLID STATE TECH JUN, P49

[6] Early K., 1990, Microelectronic Engineering, V11, P317, DOI 10.1016/0167-9317(90)90122-A

[7] FUJITA J, 1995, APPL PHYS LETT, V66, P3065, DOI 10.1063/1.114279

[8] HURTLEY MC, 1982, DIFFRACTION GRATINGS

[9] MICROTOOL FABRICATION BY ETCH PIT REPLICATION [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (12) : 1741 - 1742

[10] FORMATION OF NANOMETER-SCALE GROOVES IN SILICON WITH A SCANNING TUNNELING MICROSCOPE [J]. SCIENCE, 1993, 259 (5102) : 1724 - 1726