DEVICE FABRICATION BY SCANNED PROBE OXIDATION

被引：137

作者：

DAGATA, JA ^{[1
]}

机构：

[1] NATL INST STAND & TECHNOL, DIV PRECIS ENGN, GAITHERSBURG, MD 20899 USA

来源：

SCIENCE | 1995年 / 270卷 / 5242期

关键词：

D O I：

10.1126/science.270.5242.1625

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

[No abstract available]

引用

页码：1625 / 1626

页数：2

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