Multilayered Graphene from SiC Films via Pyrolysis in Vacuum

被引：10

作者：

Ogawa, Yasuhiro ^{[1
]}

Nakamura, Atsusi ^{[1
]}

Tanaka, Akira ^{[1
]}

Temmyo, Jiro ^{[1
]}

机构：

[1] Shizuoka Univ, Elect Res Inst, Naka Ku, Hamamatsu 4328011, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2009年 / 48卷 / 04期

关键词：

CHEMICAL-VAPOR-DEPOSITION; SURFACE DECOMPOSITION; CARBON; SUBSTRATE;

D O I：

10.1143/JJAP.48.04C140

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We demonstrate multilayered graphene formation from Sic films via pyrolysis in vacuum, where the Sic films with micro-3C and amorphous crystal structures have been grown by hydrogen radical-enhanced chemical vapor deposition. The Raman spectra composed of D, G, and 2D bands indicates multilayered graphene formed by controlling the substrate temperature in the 1250 to 1600 degrees C range and the duration time. We found that criterion parameters of the multilayered graphene such that both the peak intensity ratio of D-band against G-band and full width at half maximum of G-band are mainly dominated by pyrolysis temperature and duration time in vacuum as well as crystallinity of Sic films used. (C) 2009 The Japan Society of Applied Physics

引用

页数：5

共 14 条

[11] REMOTE PLASMA-ENHANCED CHEMICAL-VAPOR DEPOSITION OF EPITAXIAL GE FILMS [J].

RUDDER, RA ;

FOUNTAIN, GG ;

MARKUNAS, RJ .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (10) :3519-3522

[12] RAMAN SPECTRUM OF GRAPHITE [J].

TUINSTRA, F ;

KOENIG, JL .

JOURNAL OF CHEMICAL PHYSICS, 1970, 53 (03) :1126-&

[13] LEED AND AUGER-ELECTRON OBSERVATIONS OF SIC (0001) SURFACE [J].

VANBOMMEL, AJ ;

CROMBEEN, JE ;

VANTOOREN, A .

SURFACE SCIENCE, 1975, 48 (02) :463-472

[14] Very thin single-walled carbon nanotubes self-assembled on 6H-SiC(0001) substrate by surface decomposition method [J].

Zhang, Guoqiang ;

Hashimoto, Yoshitaka ;

Nakamura, Atsushi ;

Tanaka, Akira ;

Temmyo, Jiro ;

Matsui, Yoshio .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2007, 46 (1-3) :L53-L56

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