Barium strontium titanate (Ba0.7Sr0.3TiO3) forroelectric films produced by electrophoretic deposition

被引：11

作者：

Guo, HL ^{[1
]}

Gao, W ^{[1
]}

Yoo, J ^{[1
]}

机构：

[1] Univ Auckland, Dept Chem & Mat Engn, Auckland, New Zealand

来源：

CURRENT APPLIED PHYSICS | 2004年 / 4卷 / 2-4期

关键词：

ferroelectric; electrophoretic deposition; barium strontium titanate;

D O I：

10.1016/j.cap.2003.11.055

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ba0.7Sr0.3TiO3 films with controlled thickness of above 20 mum were produced on metal substrates by an electrophoretic deposition method (EPD). The composition, crystal structure and microstructure of the deposited films were characterised using scanning electron microscopy and X-ray diffractometry. The dielectric properties were measured with a Hewlett-Packard 4294A precision impedance analyser. The sintered BST films showed a sharp perovskite structure with uniform microstructure. The results indicated that a typical BST film of 20 mum thick produced by EPD after sintering for different times exhibited a relative dielectric constant ranging from 2300 to 5200 at room temperature and a dissipation factor ranging from 0.062 to 0.118 at 1 kHz. These films also possess excellent adhesion to the substrate after the sintering treatment. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：385 / 388

页数：4

共 10 条

[1] Humidity sensing properties of (Ba, Sr) TiO3 thin films grown by hydrothermal-electrochemical method [J].

Agarwal, S ;

Sharma, GL .

SENSORS AND ACTUATORS B-CHEMICAL, 2002, 85 (03) :205-211

[2]

Biesheuvel PM, 1999, J AM CERAM SOC, V82, P1451, DOI 10.1111/j.1151-2916.1999.tb01939.x

[3] Role of ionic depletion in deposition during electrophoretic deposition [J].

De, D ;

Nicholson, PS .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1999, 82 (11) :3031-3036

[4] Progress in the developments of (Ba,Sr)TiO3 (BST) thin films for Gigabit era DRAMs [J].

Ezhilvalavan, S ;

Tseng, TY .

MATERIALS CHEMISTRY AND PHYSICS, 2000, 65 (03) :227-248

[5] The properties of ferroelectric films at small dimensions [J].

Shaw, TM ;

Trolier-McKinstry, S ;

McIntyre, PC .

ANNUAL REVIEW OF MATERIALS SCIENCE, 2000, 30 :263-298

[6] The processing and properties of barium strontium titanate thick films for use in frequency agile microwave circuit applications [J].

Su, B ;

Button, TW .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2001, 21 (15) :2641-2645

[7] Electrophoretic deposition of aqueous nano-γ-Al2O3 suspensions [J].

Tang, FQ ;

Uchikoshi, T ;

Ozawa, K ;

Sakka, Y .

MATERIALS RESEARCH BULLETIN, 2002, 37 (04) :653-660

[8] Electrophoretic deposition and sintering of thin/thick PZT films [J].

Van Tassel, J ;

Randall, CA .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 1999, 19 (6-7) :955-958

[9] The fabrication and characteristics of (Ba0.5Sr0.5)TiO3 thin films prepared by pulsed laser deposition [J].

Yang, GA ;

Gu, HS ;

Zhu, J ;

Wang, YQ .

JOURNAL OF CRYSTAL GROWTH, 2002, 242 (1-2) :172-176

[10]

ZHANG T, 2002, SENSOR ACTUATOR, V3372, P1

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