Open-loop operating mode of micromachined capacitive accelerometer

被引：10

作者：

Li, BQ ^{[1
]}

Lu, DR ^{[1
]}

Wang, WY ^{[1
]}

机构：

[1] Acad Sinica, Shanghai Inst Met, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 79卷 / 03期

关键词：

open-loop; capacitive accelerometer; bias voltage; sensitivity;

D O I：

10.1016/S0924-4247(99)00286-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Electrostatic force is served as a negative feedback in closed-loop operating mode to improve the linear character of micromachined capacitive accelerometer Its function in open-loop operating mode of the capacitive accelerometer was analyzed in this paper. The derived equations to describe bias related sensitivity are in good agreement with experimental results. Based on this bias technology, an accelerometer originally used in range of +/-1 g was successfully operated in a range of +/-0.01 g with non-linearity less than 0.2%. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：219 / 223

页数：5

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