Resistive, Switching Characteristics of Sol-Gel Zinc Oxide Films for Flexible Memory Applications

被引:149
作者
Kim, Sungho [1 ]
Moon, Hanul [1 ]
Gupta, Dipti [1 ]
Yoo, Seunghyup [1 ]
Choi, Yang-Kyu [1 ]
机构
[1] Korea Adv Inst Sci & Technol, Dept Elect Engn, Sch Elect Engn & Comp Sci, Taejon 305701, South Korea
关键词
Flexible; resistance random access memory (RRAM); resistive switching; sol-gel; zinc oxide (ZnO); THIN-FILMS;
D O I
10.1109/TED.2009.2012522
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
080906 [电磁信息功能材料与结构]; 082806 [农业信息与电气工程];
摘要
Unipolar resistive switching devices are investigated for nonvolatile memory applications in a metal-insulator-metal structure in which the insulator layer is based on sol-gel-derived zinc oxide (ZnO) films prepared by a simple spin-coating process followed by thermal annealing. Fast programming (<= 50 ns) and a high off-to-on resistance ratio (> 10(4)) is demonstrated. The influences on the switching behaviors according to the crystallinity of the ZnO films are studied as a function of the annealing temperature. In addition, the devices are fabricated on a flexible plastic substrate and exhibit excellent durability upon repeated bending tests, demonstrating their potential for flexible low-cost memory devices.
引用
收藏
页码:696 / 699
页数:4
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