Unipolar resistive switching characteristics of ZnO thin films for nonvolatile memory applications

被引:433
作者
Chang, Wen-Yuan [1 ]
Lai, Yen-Chao [1 ]
Wu, Tai-Bor [1 ]
Wang, Sea-Fue [2 ]
Chen, Frederick [3 ]
Tsai, Ming-Jinn [3 ]
机构
[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan
[2] Natl Taipei Univ Technol, Dept Mat & Mineral Resources Engn, Taipei 106, Taiwan
[3] Ind Technol Res Inst, Elect & Optoelect Res Lab, Hsinchu, Taiwan
关键词
14;
D O I
10.1063/1.2834852
中图分类号
O59 [应用物理学];
学科分类号
摘要
Highly (002)-oriented and columnar-grained ZnO thin films were prepared by radio frequency magnetron sputtering at room temperature. The Pt/ZnO/Pt devices exhibit reversible and steady bistable resistance switching behaviors with a narrow dispersion of the resistance states and switching voltage. Only a low forming electric field was required to induce the resistive switching characteristics. The resistance ratios of high resistance state to low resistance state were in the range of 3-4 orders of magnitude within 100 cycles of test. It was also found that the conduction mechanisms dominating the low and high resistance states are Ohmic behavior and Poole-Frenkel emission, respectively. (c) 2008 American Institute of Physics.
引用
收藏
页数:3
相关论文
共 14 条
[1]   Highly scalable non-volatile resistive memory using simple binary oxide driven by asymmetric unipolar voltage pulses [J].
Baek, IG ;
Lee, MS ;
Seo, S ;
Lee, MJ ;
Seo, DH ;
Suh, DS ;
Park, JC ;
Park, SO ;
Kim, HS ;
Yoo, IK ;
Chung, UI ;
Moon, JT .
IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2004, TECHNICAL DIGEST, 2004, :587-590
[2]   Reproducible switching effect in thin oxide films for memory applications [J].
Beck, A ;
Bednorz, JG ;
Gerber, C ;
Rossel, C ;
Widmer, D .
APPLIED PHYSICS LETTERS, 2000, 77 (01) :139-141
[3]   Resistive switching mechanism of TiO2 thin films grown by atomic-layer deposition -: art. no. 033715 [J].
Choi, BJ ;
Jeong, DS ;
Kim, SK ;
Rohde, C ;
Choi, S ;
Oh, JH ;
Kim, HJ ;
Hwang, CS ;
Szot, K ;
Waser, R ;
Reichenberg, B ;
Tiedke, S .
JOURNAL OF APPLIED PHYSICS, 2005, 98 (03)
[4]   Electrical observations of filamentary conductions for the resistive memory switching in NiO films [J].
Kim, D. C. ;
Seo, S. ;
Ahn, S. E. ;
Suh, D. -S. ;
Lee, M. J. ;
Park, B. -H. ;
Yoo, I. K. ;
Baek, I. G. ;
Kim, H. -J. ;
Yim, E. K. ;
Lee, J. E. ;
Park, S. O. ;
Kim, H. S. ;
Chung, U-In ;
Moon, J. T. ;
Ryu, B. I. .
APPLIED PHYSICS LETTERS, 2006, 88 (20)
[5]   Low-power switching of nonvolatile resistive memory using hafnium oxide [J].
Lee, Heng-Yuan ;
Chen, Pang-Shiu ;
Wang, Ching-Chiun ;
Maikap, Siddheswar ;
Tzeng, Pei-Jer ;
Lin, Cha-Hsin ;
Lee, Lurng-Shehng ;
Tsai, Ming-Jinn .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (4B) :2175-2179
[6]   Electric-pulse-induced reversible resistance change effect in magnetoresistive films [J].
Liu, SQ ;
Wu, NJ ;
Ignatiev, A .
APPLIED PHYSICS LETTERS, 2000, 76 (19) :2749-2751
[7]   Organic electrical bistable devices and rewritable memory cells [J].
Ma, LP ;
Liu, J ;
Yang, Y .
APPLIED PHYSICS LETTERS, 2002, 80 (16) :2997-2999
[8]   Reproducible resistance switching in polycrystalline NiO films [J].
Seo, S ;
Lee, MJ ;
Seo, DH ;
Jeoung, EJ ;
Suh, DS ;
Joung, YS ;
Yoo, IK ;
Hwang, IR ;
Kim, SH ;
Byun, IS ;
Kim, JS ;
Choi, JS ;
Park, BH .
APPLIED PHYSICS LETTERS, 2004, 85 (23) :5655-5657
[9]   Localized metallic conductivity and self-healing during thermal reduction of SrTiO3 -: art. no. 075508 [J].
Szot, K ;
Speier, W ;
Carius, R ;
Zastrow, U ;
Beyer, W .
PHYSICAL REVIEW LETTERS, 2002, 88 (07) :4
[10]   Electric-pulse-induced reversible resistance in doped zinc oxide thin films [J].
Villafuerte, M. ;
Heluani, S. P. ;
Juarez, G. ;
Simonelli, G. ;
Braunstein, G. ;
Duhalde, S. .
APPLIED PHYSICS LETTERS, 2007, 90 (05)