Thermal infrared detection using dipole antenna-coupled metal-oxide-metal diodes

被引：81

作者：

Bean, Jeffrey A. ^{[1
]}

Tiwari, Badri ^{[1
]}

Bernstein, Gary H. ^{[1
]}

Fay, P. ^{[1
]}

Porod, Wolfgang ^{[1
]}

机构：

[1] Univ Notre Dame, Dept Elect Engn, Ctr Nano Sci & Technol, Notre Dame, IN 46556 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2009年 / 27卷 / 01期

关键词：

MOM; DC;

D O I：

10.1116/1.3039684

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This work focuses on dipole antenna-coupled metal-oxide-metal diodes, which can be used for the detection of long wave infrared radiation. These detectors are defined using electron beam lithography and fabricated with shadow evaporation metal deposition. Along with offering complementary metal oxide semiconductor compatible fabrication, these detectors promise high speed and frequency selective detection without biasing, a small pixel footprint, and full functionality at room temperature without cooling. Direct current current-voltage characteristics are presented along with detector response to 10.6 mu m radiation. The detection characteristics can be tailored to provide for multispectral imaging in specific applications by modifying device geometries. (C) 2009 American Vacuum Society. [DOI: 10.1116/1.3039684]

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页码：11 / 14

页数：4

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