An electronic pattern speckle shearing interferometer for the measurement of surface slope variations of three-dimensional objects

被引：21

作者：

Rastogi, PK

机构：

[1] Laboratory of Stress Analysis, Swiss Fed. Institute of Technology

来源：

OPTICS AND LASERS IN ENGINEERING | 1997年 / 26卷 / 2-3期

关键词：

D O I：

10.1016/0143-8166(95)00106-9

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An electronic pattern speckle shearing interferometer to measure the spatial derivatives of the surface topography of an arbitrary shaped object is described. The method provides accuracy and repeatibility. The sensitivity of the contour planes can be varied over a wide range. Copyright (C) 1996 Elsevier Science Ltd.

引用

页码：93 / 100

页数：8

共 11 条

[1]

[Anonymous], SPECKLE METROLOGY

[2]

DIAO H, 1993, OPTIK, V93, P45

[3]

ENNOS AE, 1978, PROGR OPTICS, V16, P233

[4]

GANESAN AR, 1988, P SOC PHOTO-OPT INS, V954, P327