Comparison of ZnO/64° LiNbO3 and ZnO/36° LiTaO3 surface acoustic wave devices for sensing application

被引：8

作者：

Kalantar-Zadeh, K. ^{[1
]}

Powell, D. A.

Sadek, A. Z.

Wlodarski, W.

Yang, Q. B.

Li, Y. X.

机构：

[1] RMIT Univ, Sch Elect & Comp Engn, Melbourne, Vic, Australia

[2] Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China

来源：

SENSOR LETTERS | 2006年 / 4卷 / 02期

关键词：

64 degrees LiNbO3; 36 degrees LiTaO3; ZnO; layered SAW; mass sensing;

D O I：

10.1166/sl.2006.015

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The performance of ZnO/64 degrees-YX LiNbO3 and ZnO/36 degrees-YX LiTaO3 layered SAW structures was compared in terms of mass sensitivity and acoustic wave velocity. It was found that the ZnO/64 degrees LiNbO3 structure has a few distinct advantages over ZnO/36 degrees LiTaO3. For ZnO/64 degrees LiNbO3, the mass sensitivity is similar to 2.5 times larger. Additionally, the optimum thickness of the ZnO guiding layer is approximately half that of the ZnO/36 degrees LiTaO3 structure, which reduces the cost of fabrication.

引用

页码：135 / 138

页数：4

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