Optical modulator in silicon-on-insulator with a low thermal signature

被引：2

作者：

Waldron, PD ^{[1
]}

Jessop, PE

Yuen, AP

Winchiu, L

Chyurlia, P

Tarr, NG

Smy, TJ

Golub, I

Xu, DX

Janz, S

机构：

[1] McMaster Univ, Hamilton, ON L8S 4L7, Canada

[2] Carleton Univ, Ottawa, ON K1S 5B6, Canada

[3] Natl Res Council Canada, Ottawa, ON K1A 0R6, Canada

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2004年 / 22卷 / 03期

关键词：

D O I：

10.1116/1.1647586

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We describe the design, fabrication, and characterization of an optical modulator in silicon-on-insulator (SOI). The modulator is based upon a rib waveguide, with a transverse p - i - n diode being used to produce a refractive index change through the plasma dispersion effect. Measurements of optical modulation show submicrosecond transition times and confirm that electronic switching dominates over thermal effects. (C) 2004 American Vacuum Society.

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收藏

页码：800 / 802

页数：3

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