Development of high-resolution single-ion PSD using random access memories

被引:5
作者
Hamano, T [1 ]
Takebe, M [1 ]
Hirao, T [1 ]
Nashiyama, I [1 ]
Kamiya, T [1 ]
Suda, T [1 ]
Sakai, T [1 ]
机构
[1] JAPAN ATOM ENERGY RES INST,TAKASAKI,GUMMA 37012,JAPAN
关键词
D O I
10.1016/S0168-583X(97)00220-6
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Using heavy-ion microbeam, we have examined the feasibility of a Static Random Memory (SRAM) as an in situ Position Sensitive Detector (PSD) with bit-cell size resolution for extremely low current ion beams. It is found that SRAM are promising candidates for high-resolution PSD to diagnose an extremely low current ion microbeam. (C) 1997 Elsevier Science B.V.
引用
收藏
页码:280 / 284
页数:5
相关论文
共 8 条
[1]  
BREESE MBH, J APPL PHYS, V77
[2]   SINGLE EVENT UPSET IMAGING WITH A NUCLEAR MICROPROBE [J].
DOYLE, BL ;
HORN, KM ;
WALSH, DS ;
SEXTON, FW .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 64 (1-4) :313-320
[3]   THE OXFORD SUBMICRON NUCLEAR MICROSCOPY FACILITY [J].
GRIME, GW ;
DAWSON, M ;
MARSH, M ;
MCARTHUR, IC ;
WATT, F .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 54 (1-3) :52-63
[4]   MICROBEAM SYSTEM FOR STUDY OF SINGLE EVENT UPSET OF SEMICONDUCTOR-DEVICES [J].
KAMIYA, T ;
UTSUNOMIYA, N ;
MINEHARA, E ;
TANAKA, R ;
OHDOMARI, I .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 64 (1-4) :362-366
[5]   SUBMICRON MICROBEAM APPARATUS USING A SINGLE-ENDED ACCELERATOR WITH VERY HIGH-VOLTAGE STABILITY [J].
KAMIYA, T ;
SUDA, T ;
TANAKA, R .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 104 (1-4) :43-48
[6]  
Knoll G.F., 1979, RAD DETECTION MEASUR
[7]   APPLICATIONS OF NUCLEAR MICROPROBES TO SEMICONDUCTOR PROCESS-DEVELOPMENTS [J].
TAKAI, M .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 104 (1-4) :501-507
[8]  
WATT F, 1987, PRINCIPELS APPL HIGH