Rigid design of fast scanning probe microscopes using finite element analysis

被引：99

作者：

Kindt, JH ^{[1
]}

Fantner, GE ^{[1
]}

Cutroni, JA ^{[1
]}

Hansma, PK ^{[1
]}

机构：

[1] Univ Calif Santa Barbara, Dept Phys, Santa Barbara, CA 93106 USA

来源：

ULTRAMICROSCOPY | 2004年 / 100卷 / 3-4期

关键词：

AFM; fast scanning probe microscope; rigid design; piezoscanner; piezostack; finite element analysis; FEA;

D O I：

10.1016/j.ultramic.2003.11.009

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

To improve the performance of atomic force microscopes regarding speed and noise sensitivity, it is important to consider the mechanical rigidity of the actuator (scanner), and the overall mechanical structure. Using finite element analysis in the design process, it was possible to increase the first resonance frequency from 950 Hz for the whole system to 23.4 kHz for the whole system. This constitutes a factor of similar to25 in resonance frequency and a factor of 625 in stiffness and, hence, noise immunity. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：259 / 265

页数：7

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