Impact of negative bias temperature instability on digital circuit reliability

被引:186
作者
Reddy, V [1 ]
Krishnan, AT [1 ]
Marshall, A [1 ]
Rodriguez, J [1 ]
Natarajan, S [1 ]
Rost, T [1 ]
Krishnan, SA [1 ]
机构
[1] Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA
来源
40TH ANNUAL PROCEEDINGS: INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM | 2002年
关键词
Degradation; Digital circuits; Frequency; Negative bias temperature instability; Niobium compounds; Ring oscillators; Stress; Titanium compounds; Voltage; Voltage-controlled oscillators;
D O I
10.1109/RELPHY.2002.996644
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have examined the impact of NBTI degradation on digital circuits through the stressing of ring oscillator circuits. By subjecting the circuit to pMOS NBTI stress, we have unambiguously determined the circuit reliability impact of NBTI. We demonstrate that the relative frequency degradation of the NBTI stressed ring oscillator increases as the voltage at operation decreases. This behavior can be explained by reduced transistor gate overdrive and reduced voltage headroom at the circuit level. We present evidence that donor interface state generation during NBTI stress is a significant component of the transistor degradation. Furthermore, we show that the Static Noise Margin of a SRAM memory cell is degraded by NBTI and the relative degradation increases as the operating voltage decreases.
引用
收藏
页码:248 / 254
页数:7
相关论文
共 14 条
[1]   The impact of intrinsic device fluctuations on CMOS SRAM cell stability [J].
Bhavnagarwala, AJ ;
Tang, XH ;
Meindl, JD .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2001, 36 (04) :658-665
[2]   CHARGE PUMPING IN MOS DEVICES [J].
BRUGLER, JS ;
JESPERS, PGA .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1969, ED16 (03) :297-+
[3]   Threshold voltage drift in PMOSFETS due to NBTI and HCI [J].
Chaparala, P ;
Shibley, J ;
Lim, P .
2000 IEEE INTERNATIONAL INTEGRATED RELIABILITY WORKSHOP FINAL REPORT, 2000, :95-97
[4]  
CHATTERJEE A, 2001, IEDM, P211
[5]   NBTI enhancement by nitrogen incorporation into ultrathin gate oxide for 0.10-μm gate CMOS generation [J].
Kimizuka, N ;
Yamaguchi, K ;
Imai, K ;
Iizuka, T ;
Liu, CT ;
Keller, RC ;
Horiuchi, T .
2000 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS, 2000, :92-93
[6]  
Krishnan A. T., 2001, IEDM, P865
[7]   NBTI-channel hot carrier effects in pMOSFETs in advanced CMOS technologies. [J].
LaRosa, G ;
Guarin, F ;
Rauch, S ;
Acovic, A ;
Lukaitis, J ;
Crabbe, E .
1997 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 35TH ANNUAL, 1997, :282-286
[8]  
LAROSA G, 2001, INT REL PHYS S TUT
[9]   The effects of plasma-induced damage on transistor degradation and the relationship to Field Programmable Gate Array performance [J].
Pagaduan, FE ;
Lee, JKJ ;
Vedagarbha, V ;
Lui, K ;
Hart, MJ ;
Gitlin, D ;
Takaso, T ;
Kamiyama, S ;
Nakayama, K .
39TH ANNUAL PROCEEDINGS: INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM 2001, 2001, :315-318
[10]  
Quader K. N., 1993, International Electron Devices Meeting 1993. Technical Digest (Cat. No.93CH3361-3), P511, DOI 10.1109/IEDM.1993.347299