Improving tribological properties of sputtered boron carbide coatings by process modifications

被引:50
作者
Eckardt, T
Bewilogua, K
van der Kolk, G
Hurkmans, T
Trinh, T
Fleischer, W
机构
[1] Fraunhofer Inst Schicht & Oberflachentech, D-38108 Braunschweig, Germany
[2] Hauzer Techno Coating Europe BV, NL-5920 PB Venlo, Netherlands
关键词
boron carbide coatings; tribological properties; low friction; reactive sputtering; structural modification; PVD;
D O I
10.1016/S0257-8972(00)00525-9
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Boron carbide coatings are well-known for extreme hardness and excellent wear resistance. In this paper a d.c. magnetron sputter process for the deposition of boron carbide coatings is described. It is shown that by adding small amounts of a hydrocarbon reactive gas (in this case acetylene) the coefficient of friction can be reduced from 0.8 down to 0.2. Results from a laboratory scale deposition device are successfully transferred to an industrial batch coater. The coating adhesion is well enhanced by a titanium interlayer. From the analysis of the chemical composition and from hardness values it is concluded that a structural modification is responsible for the improvement of sliding behaviour. It is suggested that the introduction of additional bondings reduces the brittleness of boron carbide. Furthermore, a comparison with metal-containing amorphous carbon coatings (Me-DLC) reveals several similarities. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:69 / 75
页数:7
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