The elastic properties and plastic behavior of two-dimensional polymer structures fabricated by laser interference lithography

被引：30

作者：

Choi, Taeyi ^{[1
]}

Jang, Ji-Hyun

Ullal, Chaitanya K.

LeMieux, Melburne C.

Tsukruk, Vladimir V.

Thomas, Edwin L.

机构：

[1] Iowa State Univ, Dept Mat Sci & Engn, Ames, IA 50011 USA

[2] MIT, Dept Mat Sci & Engn, Inst Soldier Nanotechnol, Cambridge, MA 02139 USA

来源：

ADVANCED FUNCTIONAL MATERIALS | 2006年 / 16卷 / 10期

关键词：

D O I：

10.1002/adfm.200500693

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The elastic and plastic properties within a two-dimensional polymer (SU8) structure with sixfold symmetry fabricated via interference lithography are presented. There is a nonuniform spatial distribution in the elastic modulus, with a higher elastic modulus obtained for nodes. (brightest regions in the laser interference pattern) and a lower elastic modulus for beams (darkest regions in the laser interference pattern) of the photopatterned films. We suggest that such a nonuniformity and unusual plastic behavior are related to the variable material properties "imprinted" by the interference pattern.

引用

页码：1324 / 1330

页数：7

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