Planar brushless magnetic micromotors

被引:18
作者
Achotte, Nicolas [1 ]
Gilles, P. -A.
Cugat, Orphee
Delamare, Jerome
Gaud, P.
Dieppedale, C.
机构
[1] Lab Elect Grenoble, F-38402 St Martin Dheres, France
[2] Lab Electrotech Grenoble, F-38402 St Martin Dheres, France
[3] Lab Elect Technol Informat, F-38054 Grenoble 9, France
关键词
high speed; MAGMAS; magnetism; micromotors; POWER-MEMS;
D O I
10.1109/JMEMS.2006.872232
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Novel planar magnetic micromotors and microgenerators of active diameter circle divide 8 mm were developed, delivering estimated torques of 100 mu N.m at speeds in excess of 140 000 r/min. Such high performances are due to an innovative use of deep lithography and silicon etching for the fabrication of the stator coils. The hybrid design of the micromotors combines a pair of double-layer three-phase stator coils and a disc-shaped SmCo rotor with eight or 15 axial pairs of poles, all enclosed in a case fabricated using watch-industry micromachining.
引用
收藏
页码:1001 / 1014
页数:14
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