Structural properties of cubic GaN epitaxial layers grown on beta-SiC

被引:9
作者
Teles, LK
Scolfaro, LMR
Enderlein, R
Leite, JR
Josiek, A
Schikora, D
Lischka, K
机构
[1] UNIV BORDEAUX 1,LAB COMPOSITES THERMOSTRUCT,F-33600 PESSAC,FRANCE
[2] UNIV GESAMTHSCH PADERBORN,FB PHYS 6,D-33098 PADERBORN,GERMANY
关键词
D O I
10.1063/1.363710
中图分类号
O59 [应用物理学];
学科分类号
摘要
Self-consistent Eight-binding total energy calculations are performed to study the deposition of a few layers of cubic GaN on (100) beta-SiC substrates. Cohesion energies, atomic displacements, dangling bond occupancies and surface reconstructions are calculated for a variety of epitaxial systems including monolayers of either Ga or N as well as single and double bilayers of GaN on either Si or C terminated substrates. The SiC substrates and Ga-N epitaxial layers are represented by 2x2 supercells of 9 Si and C monolayers plus the respective number of monolayers of Ga and N atoms. Depending on the system, surface atoms dimerize either symmetrically or asymmetrically resulting in either 2x1, c-2x2, or 2x2 surface reconstructions. At the substrate-epitaxial-layer interfaces, N binds stronger than Ga to either Si or C. Interface mixing is found to be energetically not advantageous for both C- and Si-terminated substrates, although for the latter the obtained small energy differences may suggest the possibility of mixing. (C) 1996 American Institute of Physics.
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页码:6322 / 6328
页数:7
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