Three-dimensional self-assembly of spherical block copolymer domains into V-shaped grooves

被引:52
作者
Chuang, Vivian P.
Cheng, Joy Y.
Savas, Tim A.
Ross, Caroline A.
机构
[1] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA
[2] MIT, Elect Res Lab, Cambridge, MA 02139 USA
关键词
ASYMMETRIC DIBLOCK COPOLYMERS; THIN-FILMS; COLLOIDAL CRYSTALS; ARRAYS; NANOSTRUCTURES; GRAPHOEPITAXY; ALIGNMENT; GROWTH;
D O I
10.1021/nl061866r
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The self-assembly of a spherical-morphology block copolymer into V-shaped grooves has been investigated. Although spherical morphology block copolymers typically form a bcc sphere array in bulk, the V groove promotes the formation of a well-ordered fcc close-packed sphere array with the (111) planes of the array parallel to the groove walls. The sphere size in the block copolymer adjusts depending on the commensurability between the periodicity of the block copolymer and the film thickness within the V groove. The top surface of the close-packed array, parallel to the substrate, shows a square symmetry, unlike the hexagonal symmetry seen in monolayers of spherical domains, which may provide a useful geometry for block copolymer lithography.
引用
收藏
页码:2332 / 2337
页数:6
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